JPS5887252U - 電子ビ−ム源 - Google Patents

電子ビ−ム源

Info

Publication number
JPS5887252U
JPS5887252U JP18387281U JP18387281U JPS5887252U JP S5887252 U JPS5887252 U JP S5887252U JP 18387281 U JP18387281 U JP 18387281U JP 18387281 U JP18387281 U JP 18387281U JP S5887252 U JPS5887252 U JP S5887252U
Authority
JP
Japan
Prior art keywords
beam source
electron beam
electron emitting
emitting member
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18387281U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125403Y2 (en]
Inventor
英一 後藤
相馬　嵩
染谷　輝夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN
Original Assignee
Jeol Ltd
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, RIKEN filed Critical Jeol Ltd
Priority to JP18387281U priority Critical patent/JPS5887252U/ja
Publication of JPS5887252U publication Critical patent/JPS5887252U/ja
Application granted granted Critical
Publication of JPH0125403Y2 publication Critical patent/JPH0125403Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP18387281U 1981-12-10 1981-12-10 電子ビ−ム源 Granted JPS5887252U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18387281U JPS5887252U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18387281U JPS5887252U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Publications (2)

Publication Number Publication Date
JPS5887252U true JPS5887252U (ja) 1983-06-13
JPH0125403Y2 JPH0125403Y2 (en]) 1989-07-31

Family

ID=29983520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18387281U Granted JPS5887252U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Country Status (1)

Country Link
JP (1) JPS5887252U (en])

Also Published As

Publication number Publication date
JPH0125403Y2 (en]) 1989-07-31

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